VAPOR DEPOSITION MATERIAL, METHOD FOR MANUFACTURING SUBSTRATE HAVING UNDERLAYER THEREON, AND METHOD FOR MANUFACTURING SUBSTRATE HAVING WATER-REPELLENT AND OIL-REPELLENT LAYER THEREON

Provided is a vapor deposition material that makes it possible to form an underlayer capable of uniformly forming a water-repellent and oil-repellent layer comprising a condensate of a fluorine-containing compound having a reactive silyl group, and that makes it possible to suppress variation in the...

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Bibliographische Detailangaben
Hauptverfasser: KODAIRA HIROKAZU, ISHIZEKI KENJI, TOKUNAGA YOSHIHITO, KOBAYASHI DAISUKE, IWAHASHI MAEMI
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:Provided is a vapor deposition material that makes it possible to form an underlayer capable of uniformly forming a water-repellent and oil-repellent layer comprising a condensate of a fluorine-containing compound having a reactive silyl group, and that makes it possible to suppress variation in the underlayer composition among samples when a plurality of substrates having an underlayer thereon are prepared. The present invention provides a vapor deposition material that is composed of particles containing an oxide containing: silicon; and at least one element I selected from the group consisting of group 1 elements, group 2 elements, group 13 elements, group 15 elements, and transition metal elements in the periodic table. The mass ratio of particles having a particle size of 0.5-22.4 mm is 90 mass% or more with respect to the total mass of all particles. 提供一种蒸镀材料,其能够形成可均匀地形成拒水拒油层的基底层,在制作多片带基底层的基材时,样品间的基底层的组成偏差受到抑制,所述拒水拒油层由具有反应性甲硅烷基的含氟化合物的缩合物形成。一种蒸镀材料,其由包含氧化物的颗粒构成,所述氧化物包含硅、以及选自由元素周期表第1族元素、第2族元素、第13族元素、第15族元素