LASER PROCESSING DEVICE AND METHOD FOR PROCESSING WORKPIECE
This laser processing device is provided with: a placement table for placing a workpiece; a shaping optical system that shapes a laser beam so that an irradiation region of the laser beam has a rectangular shape having short sides and long sides in a mask configured to shield a portion of the laser...
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Format: | Patent |
Sprache: | chi ; eng |
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Online-Zugang: | Volltext bestellen |
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