Closed-loop iterative compensation interference detection method, device and system

The invention discloses a closed-loop iterative compensation interference detection method, device and system, and the method comprises the steps: building a closed-loop iterative compensation interference detection device, setting an initial mode aberration coefficient of an intelligent optimization algorithm of a compensation phase optimization subsystem, and enabling the mode aberration coefficient to be an optimization variable of the intelligent optimization algorithm; according to the current mode aberration coefficient, controlling the variable compensation element to generate a corresponding phase, obtaining a corresponding interferogram after aberration compensation and an interferogram performance index corresponding to the interferogram, and judging whether the interferogram after phase compensation meets the requirement that the interferogram can be completely analyzed by the wave surface interferometer or not; and if the corresponding interferogram after the current aberration compensation cannot