CVD furnace filtering device convenient to clean on line in real time

The invention discloses a CVD furnace filtering device convenient to clean on line; an air inlet of a filter box is communicated with a furnace body, and a corrugated pipe and a pneumatic baffle valve are additionally arranged between the filtering box and the furnace body; an oil collecting tray is...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	REN JINWEI, CHEN TAO, TAO QING, LIU HANHE, GE QICHAO, HE BING, HU MINGZHE, ZHANG YANPING
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION TRANSPORTING
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