CVD furnace filtering device convenient to clean on line in real time

CVD furnace filtering device convenient to clean on line in real time

The invention discloses a CVD furnace filtering device convenient to clean on line; an air inlet of a filter box is communicated with a furnace body, and a corrugated pipe and a pneumatic baffle valve are additionally arranged between the filtering box and the furnace body; an oil collecting tray is...

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Hauptverfasser: REN JINWEI, CHEN TAO, TAO QING, LIU HANHE, GE QICHAO, HE BING, HU MINGZHE, ZHANG YANPING
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Sprache:chi ; eng
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PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEPARATION
TRANSPORTING
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creator REN JINWEI
CHEN TAO
TAO QING
LIU HANHE
GE QICHAO
HE BING
HU MINGZHE
ZHANG YANPING
description The invention discloses a CVD furnace filtering device convenient to clean on line; an air inlet of a filter box is communicated with a furnace body, and a corrugated pipe and a pneumatic baffle valve are additionally arranged between the filtering box and the furnace body; an oil collecting tray is arranged at the bottom in the filter box; two filter elements are placed at the two ends in a waste gas exhaust pipeline through supporting blocks and correspond to connectors of vacuum pumps respectively, the 1/2 position of the axial length of each filter element corresponds to the circle center of the corresponding connector of the vacuum pump, and the connectors of the vacuum pumps are completely shielded by the filter elements in the waste gas exhaust pipeline; and a gas outlet of the filter box is communicated with the waste gas exhaust pipeline through a pipeline, and two vacuum pump connectors are formed in the circumference of the waste gas exhaust pipeline, so that the waste gas discharge pipeline forms
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subjects PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEPARATION
TRANSPORTING
title CVD furnace filtering device convenient to clean on line in real time
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