Method for correcting angle measurement error of circular grating with double reading heads mounted in non-alignment manner

The invention relates to a method for correcting the angle measurement error of a circular grating with double reading heads mounted in a non-alignment manner. The method comprises the steps of firstly, constructing a measurement structure which is used for correcting the angle measurement error of...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SUN XIUZHAO, WANG YONGJUN, WANG XIAOYI, LI WEI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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