Boron nitride coating evaporation boat and preparation method thereof
The invention provides a boron nitride coating evaporation boat and a preparation method thereof, and the preparation method comprises the following steps: placing a boron source at the bottom of a reaction chamber made of a boron nitride material, placing a graphite evaporation boat substrate in th...
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| creator | HU CHANGKAI HUANG XIANGDONG |
| description | The invention provides a boron nitride coating evaporation boat and a preparation method thereof, and the preparation method comprises the following steps: placing a boron source at the bottom of a reaction chamber made of a boron nitride material, placing a graphite evaporation boat substrate in the reaction chamber and keeping a distance of 20-50mm between the graphite evaporation boat substrate and the boron source, wherein the boron source is selected from any one of diboron trioxide and boric acid; placing the reaction chamber in a chemical vapor deposition furnace, vacuumizing the chemical vapor deposition furnace, heating to 500-700 DEG C, introducing nitrogen, keeping positive pressure in the furnace, and continuously introducing nitrogen in the reaction; and heating the chemical vapor deposition furnace to the reaction temperature of 1750-1950 DEG C, keeping the temperature for 1-8 hours, and depositing and growing the boron nitride coating on the graphite evaporation boat substrate. The raw material |
| format | Patent |
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The raw material</description><subject>ARTIFICIAL STONE</subject><subject>CEMENTS</subject><subject>CERAMICS</subject><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS</subject><subject>CONCRETE</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>LIME, MAGNESIA</subject><subject>METALLURGY</subject><subject>REFRACTORIES</subject><subject>SLAG</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><subject>TREATMENT OF NATURAL STONE</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2021</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZHB1yi_Kz1PIyywpykxJVUjOTyzJzEtXSC1LLMgvArKBcklAMYXEvBSFgqLUgkSoYG5qSUZ-ikJJRmpRan4aDwNrWmJOcSovlOZmUHRzDXH20E0tyI9PLS5ITE7NSy2Jd_YzNDSysLQwMLF0NCZGDQAhrTOo</recordid><startdate>20210604</startdate><enddate>20210604</enddate><creator>HU CHANGKAI</creator><creator>HUANG XIANGDONG</creator><scope>EVB</scope></search><sort><creationdate>20210604</creationdate><title>Boron nitride coating evaporation boat and preparation method thereof</title><author>HU CHANGKAI ; HUANG XIANGDONG</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN112898049A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2021</creationdate><topic>ARTIFICIAL STONE</topic><topic>CEMENTS</topic><topic>CERAMICS</topic><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS</topic><topic>CONCRETE</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>LIME, MAGNESIA</topic><topic>METALLURGY</topic><topic>REFRACTORIES</topic><topic>SLAG</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><topic>TREATMENT OF NATURAL STONE</topic><toplevel>online_resources</toplevel><creatorcontrib>HU CHANGKAI</creatorcontrib><creatorcontrib>HUANG XIANGDONG</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>HU CHANGKAI</au><au>HUANG XIANGDONG</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Boron nitride coating evaporation boat and preparation method thereof</title><date>2021-06-04</date><risdate>2021</risdate><abstract>The invention provides a boron nitride coating evaporation boat and a preparation method thereof, and the preparation method comprises the following steps: placing a boron source at the bottom of a reaction chamber made of a boron nitride material, placing a graphite evaporation boat substrate in the reaction chamber and keeping a distance of 20-50mm between the graphite evaporation boat substrate and the boron source, wherein the boron source is selected from any one of diboron trioxide and boric acid; placing the reaction chamber in a chemical vapor deposition furnace, vacuumizing the chemical vapor deposition furnace, heating to 500-700 DEG C, introducing nitrogen, keeping positive pressure in the furnace, and continuously introducing nitrogen in the reaction; and heating the chemical vapor deposition furnace to the reaction temperature of 1750-1950 DEG C, keeping the temperature for 1-8 hours, and depositing and growing the boron nitride coating on the graphite evaporation boat substrate. The raw material</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | ARTIFICIAL STONE CEMENTS CERAMICS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIME, MAGNESIA METALLURGY REFRACTORIES SLAG SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TREATMENT OF NATURAL STONE |
| title | Boron nitride coating evaporation boat and preparation method thereof |
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