Analyzing and utilizing landscapes

An embodiment of the invention relates to analyzing and utilizing landscapes. Methods are provided of deriving a partially continuous dependency of metrology metric(s) on recipe parameter(s), analyzing the derived dependency, determining a metrology recipe according to the analysis, and conducting m...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BRINGOLTZ BARAK, SULIMARSKI ROEE, HANDELMAN AMIR, MANASSEN AMNON, ZA'EV LINDENFELD, KAMINSKY ODED, YAZIV TAL, EFRATY BORIS, ASHWAL ELTSAFON, FELER YOEL, KANDEL DANIEL, BACHAR OHAD, COOPER MOSHE, ZAHARAN OFER, LEVIANT TOM, SELLA NOGA, ZHAO ZHUANGTIAN, ADAM IDO, AMIR NURIEL, GUREVICH EVGENI, SALTOUN LILACH, MARCIANO TAL, CARMEL NADAV
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MATERIALS THEREFOR MEASURING ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TESTING
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