Internal heating type boron nitride composite fiber chemical vapor deposition equipment

The invention discloses internal heating type boron nitride composite fiber chemical vapor deposition equipment. The equipment comprises a vacuum cavity and a fiber transmission device, the vacuum cavity comprises a middle hollow cavity, an unwinding cavity and a winding cavity, the middle hollow ca...

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Hauptverfasser: BAI XIAOHANG, KONG LINGJIE
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention discloses internal heating type boron nitride composite fiber chemical vapor deposition equipment. The equipment comprises a vacuum cavity and a fiber transmission device, the vacuum cavity comprises a middle hollow cavity, an unwinding cavity and a winding cavity, the middle hollow cavity is of a tubular structure, the two ends of the middle hollow cavity are fixedly connected to the unwinding cavity and the winding cavity, an inner heating pipe is arranged in the middle hollow cavity, the two ends of the inner heating pipe penetrate through the middle hollow cavity to be arranged in the unwinding cavity and the winding cavity respectively, an insulating sealing ring is arranged in the contact position of the inner heating pipe and the unwinding cavity, and an electrode is arranged on the side surface of the insulating sealing ring and is electrically connected with a controller through a wire. The inner heating pipe is arranged in the middle hollow cavity, rapid temperature rise is achieved, o