Optical surface shape local large error compensation interference measurement device and method

The invention discloses an optical surface shape local large error compensation interference measurement device and method. The compensation interference measurement device comprises an interferometer, a two-dimensional attitude adjustment platform, and a three-dimensional translation platform, the...

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Bibliographische Detailangaben
Hauptverfasser:	LIU JUNFENG, XIONG YUPENG, PENG XIAOQIANG, CHEN SHANYONG, DAI YIFAN, XUE SHUAI, ZHAI DEDE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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