Optical surface shape local large error compensation interference measurement device and method
The invention discloses an optical surface shape local large error compensation interference measurement device and method. The compensation interference measurement device comprises an interferometer, a two-dimensional attitude adjustment platform, and a three-dimensional translation platform, the...
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| creator | LIU JUNFENG XIONG YUPENG PENG XIAOQIANG CHEN SHANYONG DAI YIFAN XUE SHUAI ZHAI DEDE |
| description | The invention discloses an optical surface shape local large error compensation interference measurement device and method. The compensation interference measurement device comprises an interferometer, a two-dimensional attitude adjustment platform, and a three-dimensional translation platform, the interferometer is fixedly disposed on the two-dimensional attitude adjustment platform, the two-dimensional attitude adjustment platform is fixedly disposed on the three-dimensional translation platform, a detector and an internal light path system are arranged in the interferometer, a spherical lens is arranged at a light outlet of the interferometer, and a pinhole plate and a compensator are mounted on an external light path of the interferometer. The device can be used for compensation interference measurement of local large errors of an optical surface shape, and has the advantages of a simple structure and easiness in light path alignment. The method is based on a laser wave surface interference principle of z |
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The compensation interference measurement device comprises an interferometer, a two-dimensional attitude adjustment platform, and a three-dimensional translation platform, the interferometer is fixedly disposed on the two-dimensional attitude adjustment platform, the two-dimensional attitude adjustment platform is fixedly disposed on the three-dimensional translation platform, a detector and an internal light path system are arranged in the interferometer, a spherical lens is arranged at a light outlet of the interferometer, and a pinhole plate and a compensator are mounted on an external light path of the interferometer. The device can be used for compensation interference measurement of local large errors of an optical surface shape, and has the advantages of a simple structure and easiness in light path alignment. 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| subjects | MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING |
| title | Optical surface shape local large error compensation interference measurement device and method |
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