SEMICONDUCTOR CHIP INCLUDING LOW-K DIELECTRIC LAYER

Disclosed is a semiconductor chip comprising a device layer on a substrate, the device layer including a plurality of semiconductor devices; a wiring structure and a lower inter-wiring dielectric layer each on the device layer, the lower inter-wiring dielectric layer surrounding the wiring structure...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HAN JUNG-HOON, NOH JUN-YONG, CHOI MIN-JUNG, LEE YEON-JIN, CHO YOON-LAE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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