MICROSTRUCTURE FLUID FLOW CONTROL DEVICE

The invention relates to a microstructure fluid flow control device having a substrate, the first substrate side of which is provided with a piezo-actuated first diaphragm, the substrate having a fluid channel extending through the substrate between the first substrate side and the second substrate...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KIBLER SEBASTIAN, CONGAR YUCEL, WALD CHRISTIAN, WACKERLE MARTIN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS TRANSPORTING
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