MICROSTRUCTURE FLUID FLOW CONTROL DEVICE

The invention relates to a microstructure fluid flow control device having a substrate, the first substrate side of which is provided with a piezo-actuated first diaphragm, the substrate having a fluid channel extending through the substrate between the first substrate side and the second substrate side opposite thereto. Further, the microstructure fluid flow control device includes a microvalve extending through the fluid passage, the microvalve being configured to close the fluid passage in an unactuated state, and a second diaphragm disposed on the first substrate side and spaced apart fromthe first diaphragm, and disposed between the fluid passage and the piezo-actuated first diaphragm. According to the invention, the second diaphragm is connected to the microvalve and is mechanicallybiased towards the first diaphragm so as to apply a biasing force (FV) to the microvalve, the biasing force (FV) being part of a restoring force (FR) that closes the fluid passage in an unactuated state of the microvalve. 本发明