SYSTEM AND METHOD FOR BEAM POSITION VISUALIZATION

The invention relates to systems and methods for beam position visualization. A charged-particle beam (CPB) is aligned to a primary axis of a CPB microscope by determining a first beam deflection drive to a beam deflector for directing the CPB passing a reference location displaced from the primary axis. The beam deflector is provided with a second beam deflection drive during the working mode ofthe CPB microscope to propagate the beam along the primary axis. The second beam deflection drive is determined based on the first beam deflection drive. 用于光束位置可视化的系统和方法。通过确定对光束偏转器的第一光束偏转驱动，将带电粒子束（CPB）对准到CPB显微镜的主轴，用于引导所述CPB经过偏离所述主轴的参考位置。在所述CPB显微镜的工作模式期间，所述光束偏转器被提供第二光束偏转驱动，以沿所述主轴传播光束。所述第二光束偏转驱动是基于所述第一光束偏转驱动而确定的。