Grid mesh of cold cathode of terahertz vacuum electronic device and preparation method thereof

The invention discloses a grid mesh of a cold cathode of a terahertz vacuum electronic device. The grid mesh comprises a grid mesh substrate, wherein a plurality of grid electrode through hole arraysarranged in the central area of the grid mesh substrate; and a grid mesh supporting ring which is positioned on the grid mesh substrate, wherein the grid mesh supporting ring and the grid mesh substrate are welded integrally. The grid mesh can be suitable for the cold cathode of the terahertz vacuum electronic device, and the good comprehensive performance of the device can be achieved. The invention further discloses a preparation method of the terahertz vacuum electronic device cold cathode grid mesh. 本发明公开了一种太赫兹真空电子器件冷阴极栅网，其包括：栅网基片，在所述栅网基片中心区域包含栅极透孔阵列；栅网支撑环，位于所述栅网基片上，二者焊接一体。该栅网能够适用于太赫兹真空电子器件冷阴极，可实现器件良好的综合性能。本发明还公开了该太赫兹真空电子器件冷阴极栅网的制备方法。