Circulating water temperature control device for growing single crystal by VGF method and application

The invention relates to a circulating water temperature control device for growing single crystal by a VGF method and application, which belong to the technical field of semiconductor materials and comprise a single crystal furnace and a circulating water system, the circulating water system compri...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WANG SHUNJIN, LIU HANBAO, HUANG PING, YE XIAODA, CHEN WEIDI, CHEN YAJUN, LYU CHUNFU, PU SHIKUN, LIU TINGLONG, LIU TINGFANG, ZHANG CHUNSHAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR CHEMISTRY CRYSTAL GROWTH METALLURGY PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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