Circulating water temperature control device for growing single crystal by VGF method and application
The invention relates to a circulating water temperature control device for growing single crystal by a VGF method and application, which belong to the technical field of semiconductor materials and comprise a single crystal furnace and a circulating water system, the circulating water system compri...
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| creator | WANG SHUNJIN LIU HANBAO HUANG PING YE XIAODA CHEN WEIDI CHEN YAJUN LYU CHUNFU PU SHIKUN LIU TINGLONG LIU TINGFANG ZHANG CHUNSHAN |
| description | The invention relates to a circulating water temperature control device for growing single crystal by a VGF method and application, which belong to the technical field of semiconductor materials and comprise a single crystal furnace and a circulating water system, the circulating water system comprises a circulating water tank, a main pipeline and a branch pipeline; circulating water sequentiallyflows through the main pipeline and the branch pipeline and reaches the single crystal furnace, and then flows through thesingle crystal furnace and returns to the circulating water tank successivelyvia the branch pipeline and the main pipeline. The single crystal furnace water inlet pipeline is provided with a circulating water flow regulating valve and a temperature control device, the single crystal furnace water outlet pipeline is provided with a temperature measuring device, and the temperature field of the next round can be subjected to micro-amplitude correction according to the crystal growth result of the upp |
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The single crystal furnace water inlet pipeline is provided with a circulating water flow regulating valve and a temperature control device, the single crystal furnace water outlet pipeline is provided with a temperature measuring device, and the temperature field of the next round can be subjected to micro-amplitude correction according to the crystal growth result of the upp</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR CHEMISTRY CRYSTAL GROWTH METALLURGY PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL |
| title | Circulating water temperature control device for growing single crystal by VGF method and application |
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