PROCESS SIMULATION MODEL CALIBRATION USING CD-SEM

Computer-implemented methods of optimizing a process simulation model that predicts a result of a semiconductor device fabrication operation to process parameter values characterizing the semiconductor device fabrication operation are disclosed. The methods involve generating cost values using a com...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	FRIED DAVID M, LU YANG, FENG YE, GAO LISHENG, MAILFERT JULIEN, SIMON DANIEL ANTHONY, ALDEN EMILY ANN, BAILEY III ANDREW D
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING PHYSICS
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