PLC-based control method in diamond growth system
The invention relates to a PLC(Programmable Logic Controller)-based control method in a diamond growth system. The PLC-based control method in the diamond growth system comprises the steps that a PLCperforms an air exhaust control process on a vacuum system according to process starting signal contr...
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| creator | MIAO DAI NIU JINYI |
| description | The invention relates to a PLC(Programmable Logic Controller)-based control method in a diamond growth system. The PLC-based control method in the diamond growth system comprises the steps that a PLCperforms an air exhaust control process on a vacuum system according to process starting signal control and feedback signals of elements in the vacuum system; the PLC performs a process control process on the vacuum system according to the feedback signals of the elements in the vacuum system so as to enter a diamond growth process; in a diamond growth process, according to a growth information formula table obtained from an upper computer, the PLC performs vacuum pressure control by utilizing the vacuum system, performs growth position control by utilizing a seeding crystal carrying disc system, performs glow control by utilizing a glow system and performs process gas control by utilizing a process gas system; and the PLC performs the air exhaust control process on the vacuum system according to process stop sign |
| format | Patent |
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The PLC-based control method in the diamond growth system comprises the steps that a PLCperforms an air exhaust control process on a vacuum system according to process starting signal control and feedback signals of elements in the vacuum system; the PLC performs a process control process on the vacuum system according to the feedback signals of the elements in the vacuum system so as to enter a diamond growth process; in a diamond growth process, according to a growth information formula table obtained from an upper computer, the PLC performs vacuum pressure control by utilizing the vacuum system, performs growth position control by utilizing a seeding crystal carrying disc system, performs glow control by utilizing a glow system and performs process gas control by utilizing a process gas system; and the PLC performs the air exhaust control process on the vacuum system according to process stop sign</description><language>chi ; eng</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2020</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20201225&DB=EPODOC&CC=CN&NR=112126910A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20201225&DB=EPODOC&CC=CN&NR=112126910A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>MIAO DAI</creatorcontrib><creatorcontrib>NIU JINYI</creatorcontrib><title>PLC-based control method in diamond growth system</title><description>The invention relates to a PLC(Programmable Logic Controller)-based control method in a diamond growth system. The PLC-based control method in the diamond growth system comprises the steps that a PLCperforms an air exhaust control process on a vacuum system according to process starting signal control and feedback signals of elements in the vacuum system; the PLC performs a process control process on the vacuum system according to the feedback signals of the elements in the vacuum system so as to enter a diamond growth process; in a diamond growth process, according to a growth information formula table obtained from an upper computer, the PLC performs vacuum pressure control by utilizing the vacuum system, performs growth position control by utilizing a seeding crystal carrying disc system, performs glow control by utilizing a glow system and performs process gas control by utilizing a process gas system; and the PLC performs the air exhaust control process on the vacuum system according to process stop sign</description><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2020</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZDAM8HHWTUosTk1RSM7PKynKz1HITS3JyE9RyMxTSMlMzM3PS1FIL8ovL8lQKK4sLknN5WFgTUvMKU7lhdLcDIpuriHOHrqpBfnxqcUFicmpeakl8c5-hoZGhkZmloYGjsbEqAEAYDUrRg</recordid><startdate>20201225</startdate><enddate>20201225</enddate><creator>MIAO DAI</creator><creator>NIU JINYI</creator><scope>EVB</scope></search><sort><creationdate>20201225</creationdate><title>PLC-based control method in diamond growth system</title><author>MIAO DAI ; NIU JINYI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN112126910A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2020</creationdate><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><toplevel>online_resources</toplevel><creatorcontrib>MIAO DAI</creatorcontrib><creatorcontrib>NIU JINYI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>MIAO DAI</au><au>NIU JINYI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>PLC-based control method in diamond growth system</title><date>2020-12-25</date><risdate>2020</risdate><abstract>The invention relates to a PLC(Programmable Logic Controller)-based control method in a diamond growth system. The PLC-based control method in the diamond growth system comprises the steps that a PLCperforms an air exhaust control process on a vacuum system according to process starting signal control and feedback signals of elements in the vacuum system; the PLC performs a process control process on the vacuum system according to the feedback signals of the elements in the vacuum system so as to enter a diamond growth process; in a diamond growth process, according to a growth information formula table obtained from an upper computer, the PLC performs vacuum pressure control by utilizing the vacuum system, performs growth position control by utilizing a seeding crystal carrying disc system, performs glow control by utilizing a glow system and performs process gas control by utilizing a process gas system; and the PLC performs the air exhaust control process on the vacuum system according to process stop sign</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | PLC-based control method in diamond growth system |
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