EXTREME UNIFORMITY HEATED SUBSTRATE SUPPORT ASSEMBLY

Implementations described herein provide a substrate support assembly which enables temperature uniformity across a workpiece surface. In one embodiment, a substrate support assembly is provided thatincludes a body. The body made from ceramic. The body having a workpiece support surface and a mounti...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LUBOMIRSKY DMITRY, FLOYD KIRBY H, SAMIR MEHMET TUGRUL, WANG JUSTIN, PARKHE VIJAY D, KORA SIDDARAMAIAH ONKARA SWAMY, BENJAMINSON DAVID
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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