Device and method for detecting and cleaning tiny dust on glass surface and film surface of photomask

The invention relates to a device and a method for detecting and cleaning tiny dust on a glass surface and a film surface of a photomask. The device includes: a loading unit including a holding portion for holding a photomask; a detection unit for detecting tiny dust on the photomask; and a cleaning unit for cleaning the detected tiny dust. When the tiny dust cleaning device is applied, a photomask to be detected can be loaded on the loading unit, the loaded photomask is kept on a keeping part, then the detection unit can be started to detect tiny dust on the photomask, and after detection iscompleted, the tiny dust can be cleaned through the cleaning unit, so that the tiny dust on the photomask is removed. According to tiny dust cleaning device, tiny dust detection and tiny dust cleaningwork can be sequentially carried out on the photomask in a continuous mode, the tiny dust detection work and the tiny dust cleaning work are seamlessly connected, and therefore the overall efficiencyof the tiny dust detection