In-situ preparation method of diamond micro structure by laser-induced ordered nucleation
The invention relates to an in-situ preparation method of a diamond micro structure by laser-induced ordered nucleation. A micro pit array is processed on a substrate by means of ultra-short pulse laser to reduce the surface energy of the surface of the substrate in the micro pit, so that the micro...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention relates to an in-situ preparation method of a diamond micro structure by laser-induced ordered nucleation. A micro pit array is processed on a substrate by means of ultra-short pulse laser to reduce the surface energy of the surface of the substrate in the micro pit, so that the micro pit is easily nucleated. Diamond nucleuses which are arranged orderly and controllable in density are formed on the surface of the substrate by employing equipment such as microwave chemical vapor deposition(CVD) equipment and secondary nucleation is inhibited to deposit a micro grain diamond film which has orientation in ordered arrangement and consistent dimension(111), and a cone array which is arranged orderly is prepared by reactive ion etching to obtain a diamond cone array structure whichis arranged orderly, and is consistent in dimension and controllable in density. The in-situ preparation method of the diamond micro structure by laser-induced ordered nucleation can prepare the diamond cone array structure |
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