Multi-tier three-dimensional memory device with dielectric support pillars and methods for making same

A multi-tier three-dimensional memory array includes multiple alternating stacks of insulating layers and electrically conductive layers that are vertically stacked. Memory stack structures includingmemory films and semiconductor channels extend through the alternating stacks. The alternating stacks...

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Bibliographische Detailangaben

Hauptverfasser:	NOZAWA KEI, TANAKA YOSHINOBU, OTSU YOSHITAKA, HOJO NAOTO, ITO KOICHI, DODA YASHUSHI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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