FLOW SENSOR

A reliable flow sensor (100) includes a sense resistor (130) and a refractory resistor (140) and with enclosures (110, 410) that have predictable thermal variations and reduced mechanical tolerances for a more consistent fluid flow and more consistent flow measurements. Thermal variations can be made predictable by using etched structures such as channels (420) in silicon blocks (110, 410). Mechanical tolerances can be reduced using lithography and high-precision semiconductor manufacturing equipment and techniques. 具有外壳(110，410)的可靠的流量传感器(100)，其具有可预测的热变化和减小的机械公差，用于更一致的流体流动和更一致的流量测量。通过在硅块(110，410)中使用蚀刻结构，可以使热变化可预测。使用光刻和高精度半导体制造设备和技术可以降低机械公差。