Dynamic pressure precise control system when low vacuum system is continuously filled with working gas

The invention discloses a dynamic pressure precise control system when a low vacuum system is continuously filled with working gas. The dynamic pressure precise control system when the low vacuum system is continuously filled with the working gas comprises a vacuum chamber, a vacuum pump group, a va...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WANG XIAOWEI, LI HU, KAN CUNDONG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BLASTING HEATING LIGHTING MECHANICAL ENGINEERING POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTMACHINES FOR LIQUIDS ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTPUMPS WEAPONS
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