COOLING DEVICE, SEMICONDUCTOR MANUFACTURING DEVICE, AND SEMICONDUCTOR MANUFACTURING METHOD

A cooling device comprises: a tank; a first path in which a pump circulates liquid phase refrigerant so that the liquid phase refrigerant is taken from the tank, cooled, and returned to the tank; anda second path branched off from the first path. The second path includes: a heater for heating the liquid phase refrigerant supplied from the first path; a flow restrictor causing a decrease in the pressure of the refrigerant heated by the heater; and a carburetor for evaporating at least a portion of the refrigerant passing through the flow restrictor by the heat transferred from an object to becooled. The second path is configured to return the refrigerant passing through the carburetor to the tank. 一种冷却设备包括槽、第一路径以及从第一路径分支的第二路径，在该第一路径中泵循环液相制冷剂以使得从槽提取液相制冷剂、冷却液相制冷剂，并且将液相制冷剂返回到槽。第二路径包括用于加热从第一路径供应的液相制冷剂的加热器、使由加热器加热的制冷剂的压力减小的节流阀和用于通过来自冷却目标的热使通过节流阀的制冷剂的至少一部分汽化的汽化器，并且通过节流阀的制冷剂被返回到槽。