Spectroscopic system, optical inspection device and semiconductor device manufacturing method

The disclosure relates to a spectroscopic system, an optical inspection device and a semiconductor device manufacturing method. A semiconductor device manufacturing method includes performing a firsttreatment process on a substrate, inspecting the substrate using a spectroscopic system that includes...

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Bibliographische Detailangaben

Hauptverfasser:	SOHN YOUNGHOON, KO KANG-WOONG, KIM MINSU, YANG YUSIN, JANG SUNGHO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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