Calibration method for scanning system of charged particle beam processing equipment

Calibration method for scanning system of charged particle beam processing equipment

The invention discloses a calibration method for a scanning system of charged particle beam processing equipment, wherein the method comprises the steps: firstly, establishing a relationship between n-phase winding exciting current instructions and phase displacement of a charged particle beam on co...

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Hauptverfasser: WEI SHOUQI, HUANG GUOHUA, LIANG ZUMING, FEI XIANG, DONG YANG, ZHANG TONG, GUO WENMING, HUANG XIAODONG, TANG QIANG
Format: Patent
Sprache:chi ; eng
Schlagworte:
GAMMA RAY OR X-RAY MICROSCOPES
IRRADIATION DEVICES
NUCLEAR ENGINEERING
NUCLEAR PHYSICS
PHYSICS
TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR
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creator WEI SHOUQI
HUANG GUOHUA
LIANG ZUMING
FEI XIANG
DONG YANG
ZHANG TONG
GUO WENMING
HUANG XIAODONG
TANG QIANG
description The invention discloses a calibration method for a scanning system of charged particle beam processing equipment, wherein the method comprises the steps: firstly, establishing a relationship between n-phase winding exciting current instructions and phase displacement of a charged particle beam on corresponding phase winding scanning axes on a working plane, and establishing a one-to-one correspondence relationship between resultant displacement of the charged particle beam on the working plane and ideal phase displacement; obtaining an included angle of n-phase winding scanning axes; correcting the phase displacement of the resultant displacement on the ideal n-phase winding scanning axis into the phase displacement on the n-phase winding scanning axes according to the included angle; andfinally, according to the relationship between the phase exciting current instructions and the phase displacement, and the relationship between the resultant displacement and the phase displacement onthe n-phase winding scann
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subjects GAMMA RAY OR X-RAY MICROSCOPES
IRRADIATION DEVICES
NUCLEAR ENGINEERING
NUCLEAR PHYSICS
PHYSICS
TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR
title Calibration method for scanning system of charged particle beam processing equipment
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