Calibration method for scanning system of charged particle beam processing equipment

The invention discloses a calibration method for a scanning system of charged particle beam processing equipment, wherein the method comprises the steps: firstly, establishing a relationship between n-phase winding exciting current instructions and phase displacement of a charged particle beam on corresponding phase winding scanning axes on a working plane, and establishing a one-to-one correspondence relationship between resultant displacement of the charged particle beam on the working plane and ideal phase displacement; obtaining an included angle of n-phase winding scanning axes; correcting the phase displacement of the resultant displacement on the ideal n-phase winding scanning axis into the phase displacement on the n-phase winding scanning axes according to the included angle; andfinally, according to the relationship between the phase exciting current instructions and the phase displacement, and the relationship between the resultant displacement and the phase displacement onthe n-phase winding scann