Preparation method of nanometer porous silicon convex lens set

The invention discloses a preparation method of a nanometer porous silicon convex lens set. According to the preparation method, a porous silicon film is prepared by means of conventional double-groove corrosion. Firstly, a positive square wave constant current source and a negative square wave cons...

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1. Verfasser: LONG YONGFU
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention discloses a preparation method of a nanometer porous silicon convex lens set. According to the preparation method, a porous silicon film is prepared by means of conventional double-groove corrosion. Firstly, a positive square wave constant current source and a negative square wave constant current source are adopted to conduct electrochemical corrosion on the left and right surfacesof a silicon slice to form porous silicon films, then the corrosion current is enlarged, and electro-polishing is conducted on the middle part of the silicon slice; then, the porous silicon films aredipped into a sodium hydroxide solution, the two round porous silicon films are rotated with the central axis of the two porous silicon films as the rotation axis, and then the convex lens set composed of the porous silicon material is formed. By the adoption of the preparation method, the nanometer porous silicon convex lens set can be obtained, and the nanometer porous silicon convex lens set can be widely applied to a m