SEMICONDUCTOR DEVICE INCLUDING DATA STORAGE PATTERN

A semiconductor device including a data storage pattern is provided. The semiconductor device includes: a first conductive wiring disposed on a substrate and extended in a first direction; a second conductive wiring disposed on the first metal wiring; a plurality of variable resistance structures, e...

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Bibliographische Detailangaben
Hauptverfasser: LEE YE-RO, SONG SI-HO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:A semiconductor device including a data storage pattern is provided. The semiconductor device includes: a first conductive wiring disposed on a substrate and extended in a first direction; a second conductive wiring disposed on the first metal wiring; a plurality of variable resistance structures, each of which includes a plurality of electrodes and a plurality of variable resistance patterns alternately stacked between the first metal wiring and the second metal wiring, wherein the plurality of variable resistance patterns are formed of a variable resistance material having a same composition, and the plurality of electrodes have different material characteristics such as different specific resistivities. 提供了包括数据存储图案的半导体器件。该半导体器件包括:第一金属布线,设置在衬底上并且在第一方向上延伸;第二金属布线,设置在第一金属布线之上;多个可变电阻结构,每个可变电阻结构包括交替地堆叠在第一金属布线和第二金属布线之间的多个电极和多个可变电阻图案,其中所述多个可变电阻图案由具有相同成分的可变电阻材料形成,并且所述多个电极具有不同的材料特性,诸如不同的电阻率。