MINIATURE SIZE FORCE SENSOR WITH BUBBLE DETECTION CAPABILITIES

A miniature size force sensor with bubble detection capabilities is disclosed. A photosensitive force sensor is provided. An example photosensitive force sensor comprises a force sensing device configured to be disposed on a surface of a substrate; a housing configured to be disposed on at least a portion of the surface of the substrate; and an actuator configured to be disposed partially within the housing and partially within the aperture defined by the housing. The housing is configured to enclose the force sensing device. The aperture is configured to provide a coupling interface. The actuator is in mechanical contact with the force sensing device. The actuator is a rigid body that is configured to provide a light path from a light source external to/outside of the housing to the forcesensing device. 本发明题为"具有气泡检测能力的微型尺寸力传感器"。本发明提供了一种感光力传感器。示例性感光力传感器包括力感测设备，该力感测设备被配置为设置在基板的表面上；壳体，该壳体被配置为设置在该基板的表面的至少一部分上；和致动器，该致动器被配置为部分地设置在壳体内且部分地设置在由壳体限定的孔内。该壳体被配置为包封力感测设备。该孔被配置为提供耦合接口。该致动器与力感测设备机械接触。该致动器是刚体，其被配置为提供从壳体外部/之外