MINIATURE SIZE FORCE SENSOR WITH MULTIPLE COUPLING TECHNOLOGY

The invention provides a miniature size force sensor with multiple coupling technology. Example systems, apparatuses and methods are disclosed for sensing a force applied by an external source. An example system comprises a substrate comprising a plurality of electrical contact pads disposed on a fi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YELLAMRAJU ADITYA VISHNU, WADE RICHARD, HM MANJUNATHA, SREERAMU SUDHEER BELIGERE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING
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