Method for determining flow threshold, control device, and semiconductor processing device
The invention provides a method for determining a flow threshold of a gas pipeline, an alarm method, a control device, and a semiconductor processing device. The determining method includes the stepsof: closing the second end of a main gas pipeline, and communicating the main gas pipeline with a byp...
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Patent |
| Sprache: | chi ; eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | JIANG HONGWEI CHENG XUWEN |
| description | The invention provides a method for determining a flow threshold of a gas pipeline, an alarm method, a control device, and a semiconductor processing device. The determining method includes the stepsof: closing the second end of a main gas pipeline, and communicating the main gas pipeline with a bypass gas pipeline; supplying a gas to the main gas pipeline at a predetermined pressure; determiningthe upper leakage flow limit of the main gas pipeline according to the predetermined pressure; measuring the stable gas flow of the bypass gas pipeline; and determining the upper flow threshold limitof the gas flowing into the main gas pipeline according to the stable gas flow of the bypass gas pipeline and the upper leakage flow limit. The method for determining the flow threshold of the gas pipeline achieves at least dynamic adjustment of the upper flow threshold limit.
本发明提供一种用于气体管路的流量阈值的确定方法、报警方法、控制装置和半导体加工设备。所述确定方法包括步骤：将主气管路的第二端封闭，将所述主气管路与旁气管路连通；以预定气压向所述主气管路供气；根据所述预定气压确定所述主气管路的漏气上限流量；测量所述旁气管路的稳定气体流量；根据所述旁气管路的稳定气体 |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_CN110571118A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>CN110571118A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_CN110571118A3</originalsourceid><addsrcrecordid>eNqNyzEKAjEQheE0FqLeYexXMIhoK4tio5WVzRKSyW4gmwmZUa9vRA9g9eDx_VN1v6AM5MBTAYeCZQwppB58pBfIUJAHiq4BS0kKxWqewWIDJjlgHEP93cNKrXMhi8yf-IvmauJNZFz8dqaWp-OtPa8wU4ecjcWE0rVXrdfbndZ6f9j8Y95Owzte</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Method for determining flow threshold, control device, and semiconductor processing device</title><source>esp@cenet</source><creator>JIANG HONGWEI ; CHENG XUWEN</creator><creatorcontrib>JIANG HONGWEI ; CHENG XUWEN</creatorcontrib><description>The invention provides a method for determining a flow threshold of a gas pipeline, an alarm method, a control device, and a semiconductor processing device. The determining method includes the stepsof: closing the second end of a main gas pipeline, and communicating the main gas pipeline with a bypass gas pipeline; supplying a gas to the main gas pipeline at a predetermined pressure; determiningthe upper leakage flow limit of the main gas pipeline according to the predetermined pressure; measuring the stable gas flow of the bypass gas pipeline; and determining the upper flow threshold limitof the gas flowing into the main gas pipeline according to the stable gas flow of the bypass gas pipeline and the upper leakage flow limit. The method for determining the flow threshold of the gas pipeline achieves at least dynamic adjustment of the upper flow threshold limit.
本发明提供一种用于气体管路的流量阈值的确定方法、报警方法、控制装置和半导体加工设备。所述确定方法包括步骤：将主气管路的第二端封闭，将所述主气管路与旁气管路连通；以预定气压向所述主气管路供气；根据所述预定气压确定所述主气管路的漏气上限流量；测量所述旁气管路的稳定气体流量；根据所述旁气管路的稳定气体</description><language>chi ; eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; SEMICONDUCTOR DEVICES</subject><creationdate>2019</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20191213&DB=EPODOC&CC=CN&NR=110571118A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20191213&DB=EPODOC&CC=CN&NR=110571118A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>JIANG HONGWEI</creatorcontrib><creatorcontrib>CHENG XUWEN</creatorcontrib><title>Method for determining flow threshold, control device, and semiconductor processing device</title><description>The invention provides a method for determining a flow threshold of a gas pipeline, an alarm method, a control device, and a semiconductor processing device. The determining method includes the stepsof: closing the second end of a main gas pipeline, and communicating the main gas pipeline with a bypass gas pipeline; supplying a gas to the main gas pipeline at a predetermined pressure; determiningthe upper leakage flow limit of the main gas pipeline according to the predetermined pressure; measuring the stable gas flow of the bypass gas pipeline; and determining the upper flow threshold limitof the gas flowing into the main gas pipeline according to the stable gas flow of the bypass gas pipeline and the upper leakage flow limit. The method for determining the flow threshold of the gas pipeline achieves at least dynamic adjustment of the upper flow threshold limit.
本发明提供一种用于气体管路的流量阈值的确定方法、报警方法、控制装置和半导体加工设备。所述确定方法包括步骤：将主气管路的第二端封闭，将所述主气管路与旁气管路连通；以预定气压向所述主气管路供气；根据所述预定气压确定所述主气管路的漏气上限流量；测量所述旁气管路的稳定气体流量；根据所述旁气管路的稳定气体</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2019</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNyzEKAjEQheE0FqLeYexXMIhoK4tio5WVzRKSyW4gmwmZUa9vRA9g9eDx_VN1v6AM5MBTAYeCZQwppB58pBfIUJAHiq4BS0kKxWqewWIDJjlgHEP93cNKrXMhi8yf-IvmauJNZFz8dqaWp-OtPa8wU4ecjcWE0rVXrdfbndZ6f9j8Y95Owzte</recordid><startdate>20191213</startdate><enddate>20191213</enddate><creator>JIANG HONGWEI</creator><creator>CHENG XUWEN</creator><scope>EVB</scope></search><sort><creationdate>20191213</creationdate><title>Method for determining flow threshold, control device, and semiconductor processing device</title><author>JIANG HONGWEI ; CHENG XUWEN</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN110571118A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2019</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>JIANG HONGWEI</creatorcontrib><creatorcontrib>CHENG XUWEN</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>JIANG HONGWEI</au><au>CHENG XUWEN</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Method for determining flow threshold, control device, and semiconductor processing device</title><date>2019-12-13</date><risdate>2019</risdate><abstract>The invention provides a method for determining a flow threshold of a gas pipeline, an alarm method, a control device, and a semiconductor processing device. The determining method includes the stepsof: closing the second end of a main gas pipeline, and communicating the main gas pipeline with a bypass gas pipeline; supplying a gas to the main gas pipeline at a predetermined pressure; determiningthe upper leakage flow limit of the main gas pipeline according to the predetermined pressure; measuring the stable gas flow of the bypass gas pipeline; and determining the upper flow threshold limitof the gas flowing into the main gas pipeline according to the stable gas flow of the bypass gas pipeline and the upper leakage flow limit. The method for determining the flow threshold of the gas pipeline achieves at least dynamic adjustment of the upper flow threshold limit.
本发明提供一种用于气体管路的流量阈值的确定方法、报警方法、控制装置和半导体加工设备。所述确定方法包括步骤：将主气管路的第二端封闭，将所述主气管路与旁气管路连通；以预定气压向所述主气管路供气；根据所述预定气压确定所述主气管路的漏气上限流量；测量所述旁气管路的稳定气体流量；根据所述旁气管路的稳定气体</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | chi ; eng |
| recordid | cdi_epo_espacenet_CN110571118A |
| source | esp@cenet |
| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| title | Method for determining flow threshold, control device, and semiconductor processing device |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-01T05%3A26%3A41IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=JIANG%20HONGWEI&rft.date=2019-12-13&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3ECN110571118A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |