ELECTROSTATIC ELEMENT HAVING GROOVED EXTERIOR SURFACE

Provided herein are approaches for increasing surface area of a conductive beam optic by providing grooves or surface features thereon. In one approach, the conductive beam optic may be part of an electrostatic filter having a plurality of conductive beam optics disposed along an ion beam-line, wher...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HERMANSON ERIC, PIXLEY JAMES ALAN, LAYNE PHILIP
Format: Patent
Sprache:chi ; eng
Schlagworte:
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