ELECTROSTATIC ELEMENT HAVING GROOVED EXTERIOR SURFACE

Provided herein are approaches for increasing surface area of a conductive beam optic by providing grooves or surface features thereon. In one approach, the conductive beam optic may be part of an electrostatic filter having a plurality of conductive beam optics disposed along an ion beam-line, wherein at least one conductive beam optic includes a plurality of grooves formed in an exterior surface. In some approaches, a power supply may be provided in communication with the plurality of conductive beam optics, wherein the power supply is configured to supply a voltage and a current to the plurality of conductive beam optics. The plurality of grooves may be provided in a spiral pattern along a length of the conductive beam optic, and/or oriented parallel to a lengthwise axis of the conductive beam optic. 本文提供通过在导电束光学器件上提供沟槽或表面特征来增大导电束光学器件的表面积的方式。在一种方式中，导电束光学器件可为具有沿离子束线设置的多个导电束光学器件的静电过滤器的一部分，其中至少一个导电束光学器件包括形成在外表面中的多个沟槽。在一些方式中，可将电源供应器设置成与所述多个导电束光学器件连通，其中电源供应器被配置成向所述多个导电束光学器件供应电压及电流。所述多个沟槽可沿导电束光学器件的长度设置成螺旋形图案，和/或