VIRTUAL IMPEDANCE AUTO MATCHING BOX

The present invention relates to a method for automatically matching virtual impedance. The method comprises the steps of: (a) determining an input parameter of an RF generator and a load condition parameter of a plasma chamber for each process type, process recipe, and process step of each process...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KIM SEA WON, WI SOON IM, CHOI KOOK YOUNG, MOON HONG KWEON, BOO KYEUNG WOON
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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