Any posture optimal element in-place surface shape detection device and method

The invention discloses an any posture optimal element in-place surface shape detection device and method; by adoption of the technical scheme, the structure is flexible, and an industrial robot is used for replacing various supporting and adjusting platforms and devices of the interferometer, so th...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YI CONGZHI, ZHANG JINLI, CAO TINGFEN, QUAN XUSONG, JIANG XIAODONG, ZHOU HAI, LI MENGYANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses an any posture optimal element in-place surface shape detection device and method; by adoption of the technical scheme, the structure is flexible, and an industrial robot is used for replacing various supporting and adjusting platforms and devices of the interferometer, so that the position posture of the interferometer is more convenient to adjust; meanwhile, the optical element supporting mechanism is simplified, so that the optical element supporting mechanism cannot have a degree of freedom adjusting function; the method is novel, and a dynamic interferometer is combined with the industrial robot, so that the problem in in-place measurement of the surface shape under the gravity inclination posture is solved; the application range is wide, and the problem of surface shape measurement under various postures can be solved at the same time; the environment adaptability is high, and the dynamic interferometer is used, so that the interferometer can be expanded into various measurement