MEMS gyroscope

The invention discloses a MEMS gyroscope, and belongs to the field of inertial measurement devices. The comb-like quartz gyroscope is formed by engraving or etching Z-cut quartz crystal with a certainthickness, and comprises two driving interdigitals, two sensing interdigitals, multiple driving elec...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WANG MIAOCAO, ZHU FULONG, CHEN QIAN, LIU XIAOJIAN, ZENG PENGJUN, HU JIANXIONG, LU ZILIN, XU YIXIN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	GYROSCOPIC INSTRUMENTS MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SURVEYING TESTING
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