MEMS gyroscope

The invention discloses a MEMS gyroscope, and belongs to the field of inertial measurement devices. The comb-like quartz gyroscope is formed by engraving or etching Z-cut quartz crystal with a certainthickness, and comprises two driving interdigitals, two sensing interdigitals, multiple driving elec...

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Hauptverfasser:	WANG MIAOCAO, ZHU FULONG, CHEN QIAN, LIU XIAOJIAN, ZENG PENGJUN, HU JIANXIONG, LU ZILIN, XU YIXIN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	GYROSCOPIC INSTRUMENTS MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SURVEYING TESTING
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creator	WANG MIAOCAO ZHU FULONG CHEN QIAN LIU XIAOJIAN ZENG PENGJUN HU JIANXIONG LU ZILIN XU YIXIN
description	The invention discloses a MEMS gyroscope, and belongs to the field of inertial measurement devices. The comb-like quartz gyroscope is formed by engraving or etching Z-cut quartz crystal with a certainthickness, and comprises two driving interdigitals, two sensing interdigitals, multiple driving electrodes, multiple sensing electrodes and a substrate. The driving interdigitals and the sensing interdigitals are arranged side by side with equal intervals, and are symmetrical with respect to the central line of the substrate. Due to the separation of the driving interdigitals and the sensing interdigitals, the coupling of the interdigital movement and spurious coupling between the electrodes arranged on the interdigitals are avoided, and the measurement accuracy of the gyroscope is ensured. Due to the structure of forming arch-shaped slots and square slots in the substrate, the working modal order and the working efficiency of the gyroscope are reduced, so that the displacement of the driving interdigitals is inc
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The comb-like quartz gyroscope is formed by engraving or etching Z-cut quartz crystal with a certainthickness, and comprises two driving interdigitals, two sensing interdigitals, multiple driving electrodes, multiple sensing electrodes and a substrate. The driving interdigitals and the sensing interdigitals are arranged side by side with equal intervals, and are symmetrical with respect to the central line of the substrate. Due to the separation of the driving interdigitals and the sensing interdigitals, the coupling of the interdigital movement and spurious coupling between the electrodes arranged on the interdigitals are avoided, and the measurement accuracy of the gyroscope is ensured. 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The comb-like quartz gyroscope is formed by engraving or etching Z-cut quartz crystal with a certainthickness, and comprises two driving interdigitals, two sensing interdigitals, multiple driving electrodes, multiple sensing electrodes and a substrate. The driving interdigitals and the sensing interdigitals are arranged side by side with equal intervals, and are symmetrical with respect to the central line of the substrate. Due to the separation of the driving interdigitals and the sensing interdigitals, the coupling of the interdigital movement and spurious coupling between the electrodes arranged on the interdigitals are avoided, and the measurement accuracy of the gyroscope is ensured. Due to the structure of forming arch-shaped slots and square slots in the substrate, the working modal order and the working efficiency of the gyroscope are reduced, so that the displacement of the driving interdigitals is inc</abstract><oa>free_for_read</oa></addata></record>
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subjects	GYROSCOPIC INSTRUMENTS MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SURVEYING TESTING
title	MEMS gyroscope
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