Substratetransfer module and substrateprocessing system having same

The invention discloses a substrate conveying module. In a substrate processing module that performs substrate processing in a state in which a plurality of substrates are mounted on a tray, the plurality of substrates on which substrate processing is to be performed are loaded on the tray. The present invention is provided with: a tray mounting unit on which a right-angled quadrilateral tray is mounted, the tray having a plurality of substrates arranged in n*m rows and columns (where n is a natural number of 2 or more and m is a natural number of 2 or more); a substrate loading unit which isprovided on one side of the tray mounting unit, leads out a plurality of substrates to be subjected to substrate processing from a carrier, and arranges the plurality of substrates in an n*k substratearrangement (k is a natural number of 2 or more); and a first substrate transport unit having a plurality of first substrate transport tools for picking up n substrates in one of the n*k rows and columns of substrate arrangem