Three-DOF (degrees of freedom) precision micro-shift probe based on electrohydraulic amplification and three-DOF precision micro-shift measuring method based on electrohydraulic amplification

The invention discloses a three-DOF (degrees of freedom) precision micro-shift probe based on electrohydraulic amplification, comprising a base, a probe tip and three measuring arms. Each measuring arm includes an electrohydraulic amplifier and a connection rod, a cavity is arranged in the electrohy...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WANG PING, LIU YI, CHEN YUANLIU, JIANG XIAOWU, XU QIAONING
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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