METHOD AND APPARATUS FOR DERIVING CORRECTIONS, METHOD AND APPARATUS FOR DETERMINING A PROPERTY OF A STRUCTURE, DEVICE MANUFACTURING METHOD

An optical system delivers illuminating radiation and collects radiation after interaction with a target structure on a substrate. A measurement intensity profile is used to calculate a measurement ofthe property of the structure. The optical system may include a solid immersion lens. In a calibrati...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	COENE WILLEM MARIE JULIA MARCEL, SCHELLEKENS ADRIANUS JOHANNES HENDRIKUS, VAN DER POST SIETSE THIJMEN, AKBULUT DUYGU, ZIJP FERRY, KUMAR NITISH, VAN VOORST PETER DANNY, ROY SARATHI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!