PRESSURE SENSOR MODULE

A pressure sensor module (10) comprises a base electrode (14) surrounding at least a part of a bottom electrode (15), and an anchor arrangement (20) on top of the base electrode (14) comprising at least two electrically conductive walls (19) that both surround at least a part of the bottom electrode...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	VIJAYAKUMAR KAILASH, PIJNENBURG REMCO HENRICUS WILHELMUS, BOUMAN HENDRIK, VAN LIPPEN TWAN, DAAMEN ROEL
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TESTING TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!