Single-chip integrated electronically-controlled liquid crystal dual-mode micromirror, preparation method thereof and optical microscope

The invention discloses a single-chip integrated electronically-controlled liquid crystal dual-mode micromirror. The single-chip integrated electronically-controlled liquid crystal dual-mode micromirror comprises a fist antireflection film, one or more compound electrodes, a first liquid crystal directional layer, a liquid crystal layer, a second liquid crystal directional layer, a common electrode, a second substrate and a second antireflection film which are parallelly arranged in sequence from top to bottom, each compound electrode comprises a first electrode, an insulating layer and a second electrode which are parallel to one another from top to bottom and coaxially arranged, the first electrodes are each of a hollow structure, the second electrodes and the common electrode are each of a solid structure, the shape of each second electrode is identical to the shape of the outer profile of the corresponding first electrode, the sizes of the second electrodes are much smaller than those of the hollow parts