Cavity cooling device of vacuum coating machine with improved structure

The invention is suitable for the technical field of coating machine auxiliary equipment and provides a cavity cooling device of a vacuum coating machine with an improved structure, comprising a coating machine cavity body, a heat conduction sleeve sleeved on the outer surface of the coating machine...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MEI YANHONG, WANG MENGREN, XU JIN, WANG MENGLIANG, ZHOU QIANG, CHEN CHUNQI, MEI HONGLEI, GAO CHUNLING, CHEN ZHUO, MENG JIAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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