Diamond device and manufacture method thereof

The invention is applicable to the field of semiconductor technology, and provides a diamond device and a preparation method thereof. The preparation method comprises the following steps of: depositing a graphene catalytic layer on a source electrode region and a drain electrode region of the diamon...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LIU QINGBIN, FENG ZHIHONG, GAO XUEDONG, WANG JINGJING, YU CUI, HE ZEZHAO, ZHOU CHUANGJIE, GUO JIANCHAO, FANG YULONG
Format: Patent
Sprache:chi ; eng
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