W-N nano composite-structured coating for miniature end milling cutters and preparation method thereof
The invention discloses a W-N nano composite-structured coating for miniature end milling cutters and a preparation method thereof, and relates to the field of material surface working. The componentsof the coating comprise 80-100at.% of tungsten and 0-20at.% of nitrogen in atomic percent. The prepa...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a W-N nano composite-structured coating for miniature end milling cutters and a preparation method thereof, and relates to the field of material surface working. The componentsof the coating comprise 80-100at.% of tungsten and 0-20at.% of nitrogen in atomic percent. The preparation method comprises the following steps: firstly, performing ultrasonic cleaning on a hard alloy miniature end milling cutter, then performing plasma etching on the surface of the hard alloy miniature end milling cutter by an electric arc enhancement type glow discharge technique; and introducing N2 and Ar into a chamber, under the condition of certain substrate negative bias, deposition temperature, sputtering target power, and the like, performing magnetron sputtering coating to obtain the W-N nano composite-structured coating. The preparation method adopts the magnetron sputtering technique to perform coating treatment on a substrate and deposit the W-N nano composite-structured coating, and the coating is w |
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