Device and method for producing defined properties of gradient layers in a system of multilayered coatings in sputtering installations

A device and method for producing defined properties of gradient layers in a system of multilayered coatings in sputtering installations. The device and method have the following features: a) a pair of cathodes arranged in a common process chamber and consisting of a first cathode body and a second cathode body supplied with direct current by means of a common power supply, wherein, before entering the process chamber, the direct current is converted into a series of pulses comprising alternating positive and negative pulses with interpulse periods in between; and b) an arrangement for controlling the length of the individual pulses and the duration of the respective interpulse periods. 用于在溅射设备中的多层涂层系统中产生梯度层的界定性质的装置及方法，具有以下特征：a)阴极对，被布置在公共处理室中、且由第阴极体以及第二阴极体组成，所述阴极对通过公共电源被供应直流电，其中，在进入所述处理室之前，所述直流电被转换为系列脉冲，所述系列脉冲具有交替的正脉冲及负脉冲、以及其间的脉冲间歇期，b)用于控制各个脉冲的长度以及相应的脉冲间歇期的持续时间的装置。